1.Vacuum Magnetron Sputtering Technology
2.Coating machines Limiting vacuum is 8x10-4 Pa,
3.Unit Limiting Vacuum 8x10-4Pa
Solar vacuum tube coating machine(OEM for your requirement)
Coating machine technical data
1,
NO. | Items | Technical requirement |
1 | Vacuum Unit deploy | 1,Unit Limiting Vacuum 8x10-4Pa 2,KT-600 oil diffusion pump 1set,Limiting Vacuum 8x10-5Pa,pumping speed 12000L/S 3,Pre-drawing 2XT-70 Rotary-vane Pump 3sets,Limiting Vacuum 1.33Pa,pumping speed 70L/S 4,Maintaining 2XT-15 Rotary-vane Pump1set,Limiting Vacuum 1.33Pa,pumping speed 15L/S |
2 | Vacuum chamber | 1set,stainless steel front-opening tank diameter 1050mmX2130mm.through the observation window you can check the operation situation. |
3 | Control power | 1set,PLC controlling coating machine operation,observe operation instruction and technological parameter. |
4 | Sputtering power | Two sets,Zhuhai invert power 30Kw/set |
5 | Sputtering magnetic control target | Three ,we have three kinds of target materials,aluminium,copper,stainless steel,target size outer diameter 70mm,inner diameter 54mm |
6 | Weight | Tank bottom unit mechanical pump |
7 | Flowing baffle | Electronic control Pneumatic baffle,material ,stainless steel |
8 | Rotating stand control | Nissan inverter |
9 | Bias power | Non |
10 | Turntable | Tubes diameter 47mmX height1800mm=60 pieces |
11 | Mass flow meter | Two sets,flow 200Sccm |
2,The machine is equipped with magnetic control target for coaxial cylindrical target, magnet size 11mmX12mmX50mm;
3,It Has broken off the water, phase, sound and light alarm function; The installed power is 90 KW
4,Coating machines Limiting vacuum is 8 x10-4 Pa, pumping speed from the atmosphere to 6.67x10-3Pa≤15min(empty furnace, no load)
5,The surface treatment of Coating machine door body and unit color can be produced according to user's requirements
Vacuum exhaust unit technology parameters
1,
NO. | Items | Technical requirement |
1 | Vacuum Unit deploy | 1,Unit Limiting Vacuum 1.3x10-3Pa K-200 oil diffusion pump 1set,2XT-15 Rotary-vane Pump 1 set |
2 | Exhaust work piece height | 1800mm |
3 | QTY | 40—50piece |
4 | The match for electricity | Half a braking control, safe interlock, leakage automatic protection |
5 | Composite vacuum machine | Produced In tsinghua |
2,Quotation diameter 58*40pcs*1800
diameter 58*50pcs*1800
3,Installed power 32KW
