Mode

Dimension

JTL-900

JTL-1100

JTL-1300

JTL-1600

Φ900*1000mm

Φ1100*1000mm

Φ1300*200 mm

Φ1600*1200 mm

Coating mode and main confirguration

3 electric-arc+2 pairs of plane rectangular cathode

6 electric-arc+2 pairs of cylindrical cathode+a pairs of plane rectangular cathode

5 electric-arc+4 pairs  of cylindrical cathode+a pairs of plane rectangular cathode

6 electric-arc+8 pairs of cylindrical cathode+a pairs of plane rectangular cathode

Application

metal decorative coating

Film Types  

Metal films,Dielectric films,Compound films,Reaction films,Muti-layer function films

Power source

Electric arc power supply,DC magnetron power supply,MF magnetron power supply.Pulse bias voltage power supply.ion source power supply.

Process gas control

Quality flowmeter + electromagnetism ceramic valve

Vacuum chamber structure

Vertical single(side) door, pump system postposition, double water-cooling

Vacuum system

Molecule pump(diffusion pump)+Roots pump +Mechanical pump  (8.0*10-4Pa)

Pumping speed

Pumping time less than 15 minutes ,from atmospheric pressure to 310 -3 Pa

Workpiece baking temperature

Normal temperature to 350 centi-degree PID control, radiation heating.

Workpiece motion mode

Public rotation Frequency control: 0-20 rotation per minute

Measure mode

Number display composite vacuum gauge: from atmosphere to 1.0*10-5Pa

Control mode

Full automation control system PC+PLC/PC+HMI

Remark

We can design the dimension of the equipment according to customers special technique requirement.