Major capability parameter

Crystal Structure

M3

Melt point (°C)

1420

Density

2.4 (g/cm3)

Doped material

No doped

B-doped

P-doped

Type

P

P

N

Resistivity

10-3~40ohm cm

10-3~40ohm cm

102~104ohm cm

E P D

≤100⁄cm2

≤100⁄cm2

≤100⁄cm2

O Content (⁄cm3)

≤1~1.8×1018

≤1~1.8×1018

≤1~1.8×1018

C Content (⁄cm3)

≤5×1016

≤5×1016

≤5×1016

Size

10×3m, 10×5m, 10×10mm, 15×15mm, 20×15mm

Special size and orientation are available upon request

Thickness

0.5mm, 1.0mm

Size Tolerances

<±0.1mm

Thickness tolerances

<±0.015mm special in <±0.005mm

Polishing

Single or double

Redirection precision

±0.5°

Redirection the edge:

2° (special in 1°)

Crystal orientation

<100>, <110>, <111>

Pack

100 clean bag, 1000 exactly clean bag