Crycal Materials

99.995% High Purity,2-3Grade Monocrystalline AL2O3

Wafer Surface Orientation

C-axis(0001)offset to M(1-100)/A(11-20) 0.2°±0.05° / 0.3°±0.1° / ±0.25°

Diameter

50.8mm ± 0.1mm / 76.2mm ± 0.25mm / 100.0 ± 0.40mm / 125.0 ± 0.3mm / 150.0 ± 0.3mm

Thickness

330um ± 15um/430um ± 10um/500um ± 10um

Major Flat

A-axis (1 1-2 0) ± 0.2°

Major Flat Length

16.0mm ± 1.0mm / 22.0mm ± 1.0mm / 32.5 ± 1.0mm / 47.5 ± 2.5mm

Minor

None

Front Surface Finish

Epi-ready polished, Ra< 0.2nm

Back Surface

SSP: Fine ground, Ra 0.4 to 1.0 um; DSP: Polished.

Edge condition

Edge defects not to exceed SEMI M3-91,

TTV

<15um/<10um/<10um

BOW

<15um/<10um/<10um

Warp

<15um/<10um/<10um

Bubble & Color

None by visual inspection in intensive light

Ground Boundary

None by visual inspection in fluorescent light

Cleanliness

Free visible contamination

Packaging

Packaged in a class 100 clean room environment, in cassettes of 25pcs or single fluroware, under a nitrogen atmosphere.

Note

R-plane (1-1 0 2), A-plane (1 1-2 0 ), and M-plane(1-1 0 0) are available; Customer's specification not listed above is also available upon request.