1.Comfortable heat, Short, effective sessions
2. CE APPROV
3. Easy to install
4.wattage:6000w
5.volt:480V
Philips InfraRed halogen lamps are designed specifically for heating
applications in the semiconductor industry such as epitaxy, CVD, RTP and
ion implant annealing.These lamps are high-power heat sources.
Tube blackening and resulting reduction in InfraRed output are negligible,
ensuring very high stability throughout the lamp lifetime for semiconductor
processing. High radiant energy concentrations are provided by InfraRed
lamps. Full power is reached within a few hundred milliseconds of switch-on.
Lamp power is fully controllable, with instant adjustment of the required
radiation level between 0 and 100%.
This means that silicon wafer temperature can be modulated
accurately over a wide range to meet process specifications precisely.
Process reproducibility is ensured by the ability to deliver exactly the same heat
dose to the silicon wafer every time