Based on piezoresistive silicon technology
MEMS technology
Stainless steel construction
Intergrated, high static pressure
Based on piezoresistive silicon technology, UPX30 is manufactured from piezoresistive silicon dies. This sensor has two flush diaphragms facing the pressure media, able to measure differential pressure of viscous liquids, th diaphragm form a chamber, in which oil is filled to isolate the sensing element and transfer pressure. The measured pressure is transmitted to the piezoresistive silicon sensing element through 316L isolated diaphragm and internal medium, thus to realize the precise transformation of electrical signal from pressure. This isolation enables the sensor to measure the pressures of corrosive fluids as well as electro conductive liquids.
This sensor is tested by computer automatically, and is compensated by laser trimming for zero and sensitivity. Its profile and assembly size have good interchangeability with some overseas' general products.
UPX30 pressure sensor is designed for easy installation with O-rings as sealing method, it is widely used for differential pressure measurement in many industrial process control areas.
Features:
Features
* Computer tested, laser trimming compensation
* Good performance, high reliability
*Imported pressure silicon dies
* Intergrated, high static pressure
* Isolated-type structure, suitable for many kinds of medium measurementium
Speifications
| pressure medium | gas liquid compatible to stainless steel |
| pressure ranges | 0~0.35,0~1,0~2.5,0~4,0~6,0~10,0~16,0~25,0~35(bar) |
| pressure type | differential(D) |
| overload pressure | 250%FS(positive end),100%FS(negative end) |
| accuracy | 0.25%FS (standard), 0.5%FS |
| output signal | ≥70mV (typical) |
| zero offset | ≤±3mV |
| system pressure | 4MPa |
| excitation | 1.5mA(not exceeding 2mA) |
| compensated temperature range | 0~+70°c |
| operating temperature range | -20~+80°c |
| storage temperature range | -40~+100°c |
| temperature coefficient of zero | 0.2%FS/10°c |
| temperature coefficient of span | 0.3%FS/10°c |
| input/output resistance | 2~6kΩ |
| insulation resistance | 100MΩ @ 50VDC |
| response time (10%~90%) | ≤1ms |
| electrical connection | 4-wire |
| material of pressure membrane | 316L |
| material of housing | 316L |
| sealing | fluoro-rubber sealing ring |
| filled oil | silicon oil, or olive oil (hygienism) |
| wire | 4-color silicon rubber shielded flexible wires |
| vibration | 20g/ (20~5000Hz) |
| service life | >1x108 times |
