... -axis is driven by the servo motor, the ballscrews and double guideways with quick response. X axis is driven by 2 servo ... weight850kg1300kgMax. positioning speed106m/minPosition precision0.06mmRepeatability0.015mmLaser cooling systemclosed circulation, double temperature controlOptical oscillator2000W,2500W, 3000W, 3300W, 4000WOscillatorPANASONICCP, USARated output ...