... color, the odourlessness, do not burn, the volatility is high, is one of stablest organic compounds, when 900°C, ... of the cold agent and integrated circuit technique 3. Quality standard of Tetrafluoromethane ITEMCOMPANY STANDARDPurity CF4%≥99.9≥99.99volume ... its tall purely gas and the mixed gas(high-purity Tetrafluoromethane mixed with the high-purity oxygen), can extensively be applied to silicon, ...