... achromatic color, the odourlessness, do not burn, the volatility is high, is one of stablest organic compounds, when 900°C, ... in a low temperature system air - cooling agent and integrated circuit, Currently, Tetrafluoromethane is the usage biggest as plasma etching ... its tall purely gas and the mixed gas(high-purity Tetrafluoromethane mixed with the high-purity oxygen), can extensively be applied to ...