... pumping speed 70L/S4,Maintaining 2XT-15 Rotary-vane Pump1set,Limiting Vacuum 1.33Pa,pumping speed 15L/S2Vacuum chamber1set,stainless ... alarm function; The installed power is 90 KW4,Coating machines Limiting vacuum is 8 x10-4 Pa, pumping speed from ... exhaust unit technology parameters1,NO.ItemsTechnical requirement1Vacuum Unit deploy1,Unit Limiting Vacuum 1.3x10-3PaK-200 oil diffusion pump 1set,2XT ...