Rare gas 1 high purity rare gas 2 99.9-99.9999% 3.Helium-He,Neon-Ne,Krypton-Kr,Xenon-Xe 4.best ... (Ar)≤1,H2O≤1, H2≤1, THC≤0.54Kr99.950%Xe≤50,N2≤1.5,O2 +Ar≤5,H2≤2,CO2≤1,CO≤1,CH4≤1,H2O ... ,O2+Ar≤5,H2≤2,TC≤3,H2O≤3,Kr≤50,N2O≤1,Total Residues≤10099.995%N2≤10,O2+Ar≤4 ... ,H2≤1,TC≤2,H2 O≤3,Kr≤30,N2O≤1,Total Residues≤5099.999%N2≤3 ... ,O2+Ar≤2,H2≤0.5,TC≤1,H2O≤2.6,Kr≤4,N2O≤0.5,Total Residues≤10