Ultimate vacuum:3Pa speed:4-300L/S power:0.75kw-30kw Function and application:1.From the atmospheric pressure to limit pressure have the higher suction speed2.To provide a clean, effluent free vacuum specifically for the space flight,solar power, chemical, pharmaceutical and petrochemical industries3.To pumping various gases:H2,O2,SF6 etc.4.It can replace mechanical pump,slide valve pump,also can ...