... high purity rare gas 2 99.9-99.9999% 3.Helium-He,Neon-Ne,Krypton-Kr,Xenon-Xe 4 ... ,H2≤7,O2 ( Ar)≤5,N2≤25,THC≤3,H2O≤2099.999-99.9996%5N,Ne≤4,H2≤ ... N2 ≤2,THC≤1.5,H2O≤33Ne99.990%H2≤3 He≤80 O2(Ar)≤2 N2≤10 THC≤2 ... %N2≤20,O2+Ar≤5,H2≤2,TC≤3,H2O≤3,Xe≤50,Total Residues≤10099.995%N2≤10, ... %N2≤20,O2+Ar≤5,H2≤2,TC≤3,H2O≤3,Kr≤50,N2O≤1,Total Residues≤10099.995% ... ,O2+Ar≤4,H2≤1,TC≤2,H2 O≤3,Kr≤30,N2O≤1,Total Residues≤5099.999%N2 ...