... ,TiC,ZrN,CrN,Ti,Ni,Cr,Cu and other compounds film,super-hard film. Metal pvd coating equipment is configuration the new target ... , double water cooling Vacuum systemMolecule pump +Roots pump +Mechanical pump(8.0*10-5Pa)Diffusion pump +Roots pump +Mechanical pump ... (8.0*10-4Pa)Workpiece baking temperature Normal temperature to 350 ...