... . Applied to metal, ceramics, glass and other materials of the surface coating of hard metal membrane and membrane metal compounds. Pumping speed ... products, tools, dies, metal, glass, ceramics, building materials, and other surface treatment industry. Main Features:1. The vacuum chamber is a ... composed of mechanical pump, roots pump, and diffusion pump. 3. Coating system for 10~28 arc or 1~4 arc column ...