... ItemsTechnical requirement1Vacuum Unit deploy1,Unit Limiting Vacuum 8x10-4Pa2,KT-600 oil diffusion pump 1set,Limiting Vacuum 8x10-5Pa,pumping speed 12000L/S3 ... ,Pre-drawing 2XT-70 Rotary-vane Pump 3sets,Limiting Vacuum 1.33Pa,pumping speed 70L/S4,Maintaining 2XT-15 ... Unit deploy1,Unit Limiting Vacuum 1.3x10-3PaK-200 oil diffusion pump 1set,2XT-15 Rotary-vane Pump 1 set2Exhaust work piece ...