Rare gas 1 high purity rare gas 2 99.9-99.9999% 3.Helium-He,Neon-Ne,Krypton-Kr,Xenon-Xe ... links for more detail. Rare GasesNo.DescSpecifiImpurities (ppm)riptioncation1Ar99.999-99.9996%5N,N2≤4,H2≤1,O2≤2,N2≤2 ... ,THC≤2,H2O≤42He≥99%Ne( H2),O2 (Ar),N2 ,CH2 TOTAL≤1%99.99-99.996%4N,Ne≤40,H2≤7 ... ,O2 ( Ar)≤5,N2≤25,THC≤3,H2O≤2099.999-99.9996%5N,Ne≤4,H2≤1,O2 ( Ar)≤1,N2 ...