... not burn, the volatility is high, is one of stablest organic compounds, when 900°C, with the copper, the nickel, the ... solubility is slightly soluble 0.0015% (load ratio), when with ignitable gaseous combustion, will decompose produces the virulent fluoride. 2 ... its tall purely gas and the mixed gas(high-purity Tetrafluoromethane mixed with the high-purity oxygen), can extensively be applied to silicon ...