... - Highly reliable direct reading Instrument designed expressly for measuring light ntensity at the wafer plane of mask aligners. ... - Spectral response close to CIE luminous spectral efficiency. - Measuring intensities of illumination in unit of Lux or ... . SPECIFICATION: Model : TM-208 UVA Light Meter Measuring rangeUVA measurementIllumination measurementSolar measurement40uW, 400uW,4,000uW,20mW40,400 ...