... Unit deploy1,Unit Limiting Vacuum 8x10-4Pa2,KT-600 oil diffusion pump 1set,Limiting Vacuum 8x10-5Pa,pumping speed 12000L/S3,Pre-drawing 2XT-70 Rotary-vane Pump ... 3sets,Limiting Vacuum 1.33Pa, ... Vacuum exhaust unit technology parameters1,NO.ItemsTechnical requirement1Vacuum Unit deploy1,Unit Limiting Vacuum 1.3x10-3PaK-200 oil diffusion pump 1set,2XT-15 Rotary-vane Pump ...